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High-Performance MEMS Flow Sensor Modules

IDT's mass flow sensor modules are ideal for use in the industrial process, healthcare and medical, and automotive markets

Image of IDT's FS1012/2012 High-Performance MEMS Flow Sensor ModulesSolid-state mass flow sensor modules from IDT measure gas or liquid flow across a sensing surface using the thermo-transfer (calorimetric) principle. The tiny flow sensors utilize a series of MEMS thermocouples which provide excellent signal-to-noise ratio. With solid thermal isolation of the active MEMS sensing element and silicon-carbide film coating, IDT flow sensors deliver excellent abrasive wear resistance and long-term reliability.

IDT offers an un-calibrated millivolt output or fully calibrated and linearized version for either gas or liquid with typical accuracy down to 2% of reading.

Features
  • Measures gas or liquid flow 
  • MEMS thermopile sensing
  • Silicon-carbide coating over MEMS flow sensor
  • Robust solid isolation technology
  • No cavity in MEMS element to cause clogging
  • Resistant to vibration and pressure shock
  • High accuracy, high sensitivity
  • Fast response time
  • Easy cleaning and sterilization
  • 3 VDC to 5 VDC supply options
  • Food-grade compatible version
Applications
  • Industrial process
  • Healthcare
  • Medical devices
  • Automotive systems

High-Performance MEMS Flow Sensor Modules

ImageManufacturer Part NumberDescriptionAvailable QuantityView Details
THERMAL MASS FLOW SENSORFS1012-1100-NGTHERMAL MASS FLOW SENSOR115 - ImmediateView Details
THERMAL MASS FLOW SENSORFS1012-1002-LQTHERMAL MASS FLOW SENSOR0View Details
CALIBRATED MASS FLOW SENSORFS2012-1100-NGCALIBRATED MASS FLOW SENSOR48 - ImmediateView Details
CALLIBRATED MASS FLOW SENSORFS2012-1002-LQCALLIBRATED MASS FLOW SENSOR0View Details
THERMAL MASS FLOW SENSORFS1012-1001-LQTHERMAL MASS FLOW SENSOR0View Details
THERMAL MASS FLOW SENSORFS1012-1020-NGTHERMAL MASS FLOW SENSOR47 - ImmediateView Details
THERMAL MASS FLOW SENSORFS2012-1001-LQTHERMAL MASS FLOW SENSOR0View Details
CALIBRATED MASS FLOW SENSORFS2012-1020-NGCALIBRATED MASS FLOW SENSOR48 - ImmediateView Details
LIQUID FLOW SENSOR MODULE, AMPLIFS1023LIQUID FLOW SENSOR MODULE, AMPLI0View Details
LIQUID FLOW SENSOR MODULE, AMPLIFS1025LIQUID FLOW SENSOR MODULE, AMPLI4 - ImmediateView Details
LIQUID FLOW SENSOR MODULE, AMPLIFS1027LIQUID FLOW SENSOR MODULE, AMPLI8 - ImmediateView Details

Evaluation Kits / Sensor Kits

ImageManufacturer Part NumberDescriptionAvailable QuantityView Details
FS2012 GAS FLOW SENSOR EVAL KITSDAF01FS2012 GAS FLOW SENSOR EVAL KIT5 - ImmediateView Details
FS2012 LIQUIDFLOW SENSOR EVALKITSDAF02FS2012 LIQUIDFLOW SENSOR EVALKIT18 - ImmediateView Details
WIRELESS DEMO KITSDAWIR01WIRELESS DEMO KIT2 - ImmediateView Details
WIRELESS DEMO KITSDAWIR02WIRELESS DEMO KIT3 - ImmediateView Details
Updated: 2018-08-13
Published: 2017-09-27