FS1012/2012 High-Performance MEMS Flow Sensor Modules

IDT's FS1012 and FS2012 mass flow sensor modules are ideal for use in the industrial process, healthcare and medical, and automotive markets

Image of IDT's FS1012/2012 High-Performance MEMS Flow Sensor ModulesSolid-state mass flow sensor modules from IDT measure gas or liquid flow across a sensing surface using the thermo-transfer (calorimetric) principle. The tiny flow sensors utilize a series of MEMS thermocouples which provide excellent signal-to-noise ratio. With solid thermal isolation of the active MEMS sensing element and silicon-carbide film coating, IDT flow sensors deliver excellent abrasive wear resistance and long-term reliability.

IDT offers an un-calibrated millivolt output or fully calibrated and linearized version for either gas or liquid with typical accuracy down to 2% of reading.

Features
  • Measures gas or liquid flow 
  • MEMS thermopile sensing
  • Silicon-carbide coating over MEMS flow sensor
  • Robust solid isolation technology
  • No cavity in MEMS element to cause clogging
  • Resistant to vibration and pressure shock
  • High accuracy, high sensitivity
  • Fast response time
  • Easy cleaning and sterilization
  • 3 VDC to 5 VDC supply options
  • Food-grade compatible version
Applications
  • Industrial process
  • Healthcare
  • Medical devices
  • Automotive systems

FS1012/2012 High-Performance MEMS Flow Sensor Modules

ImageManufacturer Part NumberDescriptionAvailable QuantityView Details
FS1012-1002-LQ datasheet linkTHERMAL MASS FLOW SENSORFS1012-1002-LQTHERMAL MASS FLOW SENSOR42 - Immediate
FS1012-1002-LQ product page link
FS1012-1100-NG datasheet linkTHERMAL MASS FLOW SENSORFS1012-1100-NGTHERMAL MASS FLOW SENSOR15 - Immediate
FS1012-1100-NG product page link
FS2012-1002-LQ datasheet linkCALLIBRATED MASS FLOW SENSORFS2012-1002-LQCALLIBRATED MASS FLOW SENSOR10 - Immediate
FS2012-1002-LQ product page link
FS2012-1001-LQ datasheet linkTHERMAL MASS FLOW SENSORFS2012-1001-LQTHERMAL MASS FLOW SENSOR8 - Immediate
FS2012-1001-LQ product page link
FS1012-1020-NG datasheet linkTHERMAL MASS FLOW SENSORFS1012-1020-NGTHERMAL MASS FLOW SENSOR18 - Immediate
FS1012-1020-NG product page link
FS2012-1020-NG datasheet linkCALIBRATED MASS FLOW SENSORFS2012-1020-NGCALIBRATED MASS FLOW SENSOR6 - Immediate
FS2012-1020-NG product page link
FS1012-1001-LQ datasheet linkTHERMAL MASS FLOW SENSORFS1012-1001-LQTHERMAL MASS FLOW SENSOR1 - Immediate
FS1012-1001-LQ product page link
FS2012-1100-NG datasheet linkCALIBRATED MASS FLOW SENSORFS2012-1100-NGCALIBRATED MASS FLOW SENSOR0FS2012-1100-NG product page link

Evaluation Kits

ImageManufacturer Part NumberDescriptionAvailable QuantityView Details
SDAF02 datasheet linkFS2012 LIQUIDFLOW SENSOR EVALKITSDAF02FS2012 LIQUIDFLOW SENSOR EVALKIT20 - Immediate
SDAF02 product page link
SDAF01 datasheet linkFS2012 GAS FLOW SENSOR EVAL KITSDAF01FS2012 GAS FLOW SENSOR EVAL KIT4 - Immediate
SDAF01 product page link
Published: 2017-09-27